SYNTHETIC QUARTZ GLASS AND METHOD FOR PREPARING THE SAME

摘要

A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1x10<17> molecules/cm<3>, reduction type defects are at most 1x10<15> defects/cm<3>, and the relation between DELTA k163 and DELTA k190, as between before and after irradiation of ultraviolet rays, satisfies 0< DELTA k163< DELTA k190, and a process for its production.