ELECTROSTATIC CHUCK INCLUDING THE HOLES FOR SUPPLYING AND COLLECTING COOLING GAS

摘要

PURPOSE: An electrostatic chuck including the holes for supplying and collecting cooling gas is provided to prevent cooling gas from leaking to the inside of a chamber by collecting the coolant induced through the hole for supplying cooling gas while using the hole for collecting cooling gas. CONSTITUTION: A wafer is attached to the upper surface of the electrostatic chuck(10) including the hole(11a,11b) for supplying cooling gas and the hole(20) for collecting cooling gas. The cooling gas is supplied by the hole for supplying cooling gas. The hole for collecting cooling gas collects the cooling gas. The electrostatic chuck further includes a flow path through which the cooling gas is transferred.