发明名称 |
ABRASIVE FILM AND METHOD OF PRODUCING THE SAME |
摘要 |
<p>A polishing film capable of smoothly finishing the surface of a precision instrument without leaving any localized unpolished spots is provided. A polishing film includes a plastic film 1 and a polishing layer 5 formed on its surface, having a mixture of a first group of silica particles 2 with a first average diameter and a second group of silica particles 3 with a second average diameter fixed in a resin binder 4, the first average diameter and the second average diameter being different from each other and both within a range of 0.001-10µm. A network of cracks 6 is formed on the surface of the polishing layer 5. The network of cracks 6 serves to take in waste materials generated during a polishing process. The mixture of the two groups of silica particles has a granularity distribution curve with two peaks at two different diameter values corresponding to the first and second average diameters.</p> |
申请公布号 |
EP1403001(A1) |
申请公布日期 |
2004.03.31 |
申请号 |
EP20020722865 |
申请日期 |
2002.04.26 |
申请人 |
NIHON MICRO COATING CO., LTD.;NTT ADVANCED TECHNOLOGY CO., LTD. |
发明人 |
YAMAZAKI, TORU;BABA, TETSUYA;MURATA, OSAMU |
分类号 |
B24D3/00;B05D5/02;B24B19/22;B24D3/28;B24D11/00;B32B27/14;G02B6/38;(IPC1-7):B24D3/00;B24B3/28 |
主分类号 |
B24D3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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