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摘要
申请公布号
JP3514712(B2)
申请公布日期
2004.03.31
申请号
JP20000236894
申请日期
2000.08.04
申请人
发明人
分类号
H01L21/306;H01L21/302;H01L21/304;H01L21/68;(IPC1-7):H01L21/306
主分类号
H01L21/306
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