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摘要
申请公布号
JP3513206(B2)
申请公布日期
2004.03.31
申请号
JP19940049661
申请日期
1994.03.22
申请人
发明人
分类号
C23C16/24;C23C16/50;C23C16/509;H01J37/32;H01L21/205;H01L21/302;(IPC1-7):C23C16/509
主分类号
C23C16/24
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