发明名称 Laser light source device and surface inspection apparatus employing the same
摘要 <p>In a laser light source device (2), a light source unit (11) is constructed by one condenser lens (14) for condensing a laser beam emitted from one semiconductor Laser (12), another condenser lens (15) for condensing a laser beam emitted from another semiconductor laser (13), and a focusing lene (17) for focusing and projecting the laser beam condensed by one condenser lens and the laser beam condensed by another lens onto an incident face (16a) of one light guiding means. &lt;IMAGE&gt;</p>
申请公布号 EP1403984(A2) 申请公布日期 2004.03.31
申请号 EP20030090310 申请日期 2003.09.23
申请人 KABUSHIKI KAISHA TOPCON 发明人 IWA, YOICHIRO;SEKINE, AKIHIKO;MIYAKAWA, KAZUHIRO;ISOZAKI, HISASHI
分类号 G01N21/84;G01N21/47;G01N21/95;G01N21/956;G02B6/28;G02B6/32;G02B6/42;H01L21/66;(IPC1-7):G01N21/00;G02B27/10;G02B27/16;H01S5/40 主分类号 G01N21/84
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