DEVICE FOR FORMING MAGNETIC FIELD OF NEAR FIELD RECORDING OPTICAL HEAD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A device for forming a magnetic field of a near field recording optical head and a manufacturing method thereof are provided to improve precision by minimizing an allowance between centers of a coil shaft and a light passing hole. CONSTITUTION: A lower insulation film(2) is formed on an upper face of a wafer(1), a lower metal layer is formed on the lower insulation film, and a left/right pad forming part and an extended part(5) are formed by patterning the lower metal layer. A partially exposed part formed on the left/right pad forming part and the extended part, and a hole forming part(7) at a center are exposed by forming an upper insulation film(6) on entire upper face, and patterning the upper metal layer. A thin coil film forming part is formed by forming/patterning an upper metal layer. A metal plated mold(11) having a constant height except the left/right pad forming part and the coil forming part is formed by coating/exposing photoresist. A left/right pad and a coil are formed by forming a metal plated layer. The light passing hole(14) is formed by removing a hole forming part of a center part.