DISPLAY PIXEL WITH TWO-STORY CAPACITOR AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A method for fabricating a display pixel with a two-story capacitor is provided to reduce the area of pixel occupied by a capacitor by using a two-story capacitor instead of a single-story capacitor. CONSTITUTION: An active layer(200) is formed on a substrate. A gate oxide layer(202), a gate layer(204) and a capping layer(206) are sequentially deposited on the active layer. The gate layer and the capping layer are etched to form a gate. A spacer is formed on the side surface of the gate. An ion implantation process is performed on the upper surface of the resultant structure. A conductive layer is deposited on the resultant structure to form the capacitor between the conductive layer and the gate and between the gate and the active layer.