| 发明名称 |
SYNTHETIC QUARTZ GLASS AND METHOD FOR PREPARATION THEREOF |
| 摘要 |
A synthetic quartz glass to be used for light in a vacuum ultraviolet region with a wavelength of at most 175 nm, which is characterized in that the OH group content in the synthetic quartz glass is less than 10 ppm, and it contains substantially no reduction type defects. |
| 申请公布号 |
EP1067097(A4) |
申请公布日期 |
2004.03.31 |
| 申请号 |
EP19990962506 |
申请日期 |
1999.12.24 |
| 申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
IKUTA, YOSHIAKI;KIKUGAWA, SHINYA;MASUI, AKIO;SHIMODAIRA, NORIAKI;YOSHIZAWA, SHUHEI |
| 分类号 |
C03B8/04;C03B19/14;C03C3/06;C03C23/00 |
主分类号 |
C03B8/04 |
| 代理机构 |
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代理人 |
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