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发明名称
摘要
申请公布号
JP3513438(B2)
申请公布日期
2004.03.31
申请号
JP19990255149
申请日期
1999.09.09
申请人
发明人
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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