Use of a valve arrangement for a vacuum pump

摘要

The arrangement has a valve head (1) displaceable perpendicular to a flow direction of fluid through the arrangement. A valve spring (12) biases the valve head into a flat abutment engagement with a valve seat. The valve spring is formed of a hollow body made of an elastomeric material. The valve body is provided with a flat sealing unit formed by a coating deposited on a side of the valve head adjacent to the seat.