| 摘要 |
A multilayer microelectromechanical electrostatic actuator for producing drop-on-demand liquid emission devices is made by: (a) patterning a first electrode layer and a passivation layer on an initial patterned layer; (b) attaching micropatterned conductive second electrode layer; (c) forming patterned layer of sacrificial material; and (d) removing sacrificial material. Manufacture of a multilayer microelectromechanical electrostatic actuator for producing drop-on-demand liquid emission devices, comprises: (a) forming an initial patterned layer of sacrificial material on a substrate; (b) depositing and patterning, at a position opposed to the substrate, a first electrode layer and a passivation layer on the initial layer of sacrificial material; (c) attaching, at a position opposed to the initial patterned layer and passivation layer, a preformed micropatterned conductive second electrode layer to the first electrode layer, the second electrode layer is electrically isolated from the first electrode layer, and concave on opposed sides, increasing in thickness radially from its center; (d) forming a subsequent patterned layer of sacrificial material on the second electrode layer such that a region of the first electrode layer is exposed through an opening through the subsequent layer of sacrificial material; (e) depositing patterning and planarizing a structure on the subsequent layer of sacrificial material to a depth so as to at least fill the opening through the subsequent layer of sacrificial material; (f) depositing and patterning a third electrode layer on the structure and the exposed surface of the subsequent layer of sacrificial material, where the first electrode layer and the third electrode layer are attached by the structure; and (g) removing sacrificial material from the initial layer and the subsequent layer, where the first electrode layer, the structure, and the third electrode layer are free to move together relative to the second electrode layer. |
