Thermal processing roller and temperature control apparatus for roller

摘要

The roller has a heat transfer medium flowing path and heats a resin film unit to be processed abutting against a surface of the roller. The heat from the unit is absorbed due to the flow of heat transfer fluid through the heat transfer medium flowing path by pump. A sealed chamber (23) is formed within a thick portion of the roller, where chamber extends to seal the heat transfer medium of vapor-liquid phases. An independent claim is also included for a temperature control apparatus for the thermal processing roller.