发明名称 Semiconductor device and method for fabricating the same
摘要 In the method for fabricating a semiconductor device of the present invention, a collector layer of a first conductivity type is formed in a region of a semiconductor substrate sandwiched by device isolation. A collector opening is formed through a first insulating layer deposited on the semiconductor substrate so that the range of the collector opening covers the collector layer and part of the device isolation. A semiconductor layer of a second conductivity type as an external base is formed on a portion of the semiconductor substrate located inside the collector opening, while junction leak prevention layers of the same conductivity type as the external base are formed in the semiconductor substrate. Thus, the active region is narrower than the collector opening reducing the transistor area, while minimizing junction leak.
申请公布号 US6713790(B2) 申请公布日期 2004.03.30
申请号 US20020212799 申请日期 2002.08.07
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 ASAI AKIRA;OONISHI TERUHITO;TAKAGI TAKESHI;SAITOH TOHRU;HARA YOSHIHIRO;YUKI KOICHIRO;NOZAWA KATSUYA;KANZAWA YOSHIHIKO;KATAYAMA KOJI;ICHIKAWA YO
分类号 H01L21/331;H01L21/763;H01L21/8249;H01L27/06;H01L29/737;(IPC1-7):H01L31/072;H01L31/109;H01L31/033;H91L31/032 主分类号 H01L21/331
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