发明名称 Mask for and method of forming a character on a substrate
摘要 A mask for and method of forming a character on a substrate of a semiconductor device that can be clearly observed even if positioned over complex and random patterns formed on the substrate. The mask includes a transparent medium that includes one or more plurality of regions that each includes a plurality of opaque gratings or lines. The gratings are configured to form a character (or indicia) that contrasts with the remainder of the medium. When light is passed through the mask, the light is refracted off the gratings, thereby producing markedly different colors and/or intensities of light on the substrate. The mask is used during a positive or negative etching process to form a character on a surface of a semiconductor substrate that can be easily viewed by an observer without magnification.
申请公布号 US6713842(B1) 申请公布日期 2004.03.30
申请号 US20000639798 申请日期 2000.08.17
申请人 ADVANCED MICRO DEVICES, INC. 发明人 MANCHESTER TERENCE
分类号 G01R31/26;H01L21/301;H01L21/76;H01L23/544;(IPC1-7):H01L23/544 主分类号 G01R31/26
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