Surface shape recognition apparatus

摘要

A surface shape recognition apparatus includes a plurality of sensor electrodes, passivation film, capacitance detection circuit, and ground electrode. The sensor electrodes are formed on an interlevel insulator on a substrate and insulated from each other. The passivation film is formed on the interlevel insulator to cover the upper and side surfaces of each sensor electrode. The passivation film is formed from a dielectric material. When a target recognition object comes into contact with the surface of the passivation film, the capacitance detection circuit detects an electrostatic capacitance formed between the sensor electrode and the surface of the target recognition object opposing the sensor electrode. The ground electrode passes static electricity on the surface of the passivation film.