| 发明名称 |
Method of detecting pattern defects |
| 摘要 |
An input subject pattern is compared with a good product pattern that is registered beforehand, and a different portion of these is detected as a defect pattern. The detected defect pattern is classified in accordance with the features of the contour of the defect pattern.
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| 申请公布号 |
US6714671(B1) |
申请公布日期 |
2004.03.30 |
| 申请号 |
US20000587225 |
申请日期 |
2000.06.02 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
WAKITANI KOICHI;YUKAWA NORIAKI |
| 分类号 |
G01B11/30;G01N21/88;G06K9/00;G06K9/20;G06K9/48;G06K9/68;G06T1/00;G06T7/00;H01L21/66;(IPC1-7):G06K9/00 |
主分类号 |
G01B11/30 |
| 代理机构 |
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代理人 |
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