Piezoelectric device with feedback sensor

摘要

A piezoelectric device, such as a piezoelectric fan or microjet generator, for moving a fluid comprising a fluid-moving member having a first piezoelectric (PZT) actuator element coupled thereto to drive or actuate the movable member and a second piezoelectric (PZT) sensing element coupled thereto to provide feedback information related to fluid parameter. The second PZT element also can be used to drive the movable member in conjunction with the first PZT element. The feedback information can be used by a controller to control operation of the piezoelectric device.