| 发明名称 |
Oxide thin film for a bolometer, process for producing the same, and infrared sensor using the same |
| 摘要 |
A thin film made of a cobalt-based oxide represented by YBaCo2O5.5+x (-0.5<x<0.05) is used as a resistor material for a bolometer. Provided is also an infrared sensor having a microbridge structure and using the cobalt-based oxide thin film. The temperature coefficient of the electric resistance thereof can be made large.
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| 申请公布号 |
US6713763(B2) |
申请公布日期 |
2004.03.30 |
| 申请号 |
US20010985995 |
申请日期 |
2001.11.07 |
| 申请人 |
NEC CORPORATION |
发明人 |
YOSHITAKE TSUTOMU;IMAI HIDETO |
| 分类号 |
G01J1/02;C01G51/00;G01J5/02;G01J5/20;H01C7/04;H01L27/14;H01L37/00;(IPC1-7):G01J5/00 |
主分类号 |
G01J1/02 |
| 代理机构 |
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代理人 |
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| 地址 |
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