发明名称 |
Method for screening semiconductor devices for contact coplanarity |
摘要 |
A method for determining contact coplanarity of packaged semiconductor devices having a plurality of contacts. The method includes the steps of measuring the relative positions of the contacts on a subject semiconductor device; calculating from the measurements seating planes 64 formed by tilting the device to one or more of its corners and/or sides such that each said plane comprises contacts at or adjacent to the corners of the device; using the measured relative contact positions and the calculated seating planes to determine the highest deviation from contact coplanarity for the semiconductor device. |
申请公布号 |
US6713311(B2) |
申请公布日期 |
2004.03.30 |
申请号 |
US20010962407 |
申请日期 |
2001.09.25 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WONG LIK SON |
分类号 |
G01R31/04;G01R31/28;H01L23/495;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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