| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method in which a pattern is inspected without being influenced by a change in a hole position in a working operation. SOLUTION: From pattern data in a designing operation, edge data which indicates a pattern edge is extracted, and it is used as a first master pattern (Step 102). From NC data, edge data which indicates a hole edge is extracted, and it is used as a second master pattern (Step 104). In a pattern to be measured, the deviation amount of a hole position is computed (Step 109). When the deviation amount of the hole position is within a tolerance, the position of the second master pattern is deviated by the position of the deviation amount (Step 111). The first master pattern, the second master pattern whose position is corrected and the pattern to be measured are compared (Steps 112, 113). |
