| 摘要 |
PURPOSE: To provide a manufacturing method of an optical waveguide capable of increasing the refractive index itself of a core layer and increasing the difference in the refractive indexes of the core layer and a clad layer. CONSTITUTION: In the manufacturing method of the optical waveguide provided with the core layers 22a, 22b, and 23a, and the clad layers 23b and 24 covering the core layers 22a, 22b, and 23a, a mixed gas containing methylsilane and at least one of nitrogen(N2) and ammonia(NH3) is turned into plasma and made to react, and a silicon nitride film to be the core layers 22a, 22b, and 23a is formed.
|
