INTERFERENCE FILTER, SEMICONDUCTOR PHOTODETECTOR AND ELECTRONIC DEVICE INCLUDING THOSE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor photodetector including an interference filter having an excellent heat resistance at low cost in a simple manner. SOLUTION: The semiconductor photodetector including the interference filter includes a semiconductor photodetector and the interference filer formed by a vapor deposition method using the semiconductor substrate of the photodetector as a base. The interference filter includes a plurality of high-refractive index layers and a plurality of low-refractive index layers which are alternately laminated. The high-refractive index layers consist of Ta2O5or Nb2O5and at least the major regions thereof are substantially amorphous. The low-refractive index layers comprises amorphous SiO2. COPYRIGHT: (C)2004,JPO