| 摘要 |
PROBLEM TO BE SOLVED: To keep long the distance between an objective lens and a measuring sample even when using the objective lens having large NA to cope with a tilt angle of the measuring sample, and to enlarge the degree of freedom of a measurable shape by preventing interference between the objective lens and the measuring sample. SOLUTION: In this three-dimensional shape measuring device of an optical probe system for converging measuring light, the shape of a measuring object 113 is measured on the position where the measuring light is defocused. COPYRIGHT: (C)2004,JPO
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