| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-size immersion apparatus which can immerse/treat an object without using a large amount of a treatment liquid. SOLUTION: A cylindrical rotary immersion tank 1 in which a spirally extending immersion passage 14 with both ends opened is formed is rotated around an approximately horizontal axis by a driving means M. A workpiece W and the treatment liquid L are supplied synchronously with a rotation period to a supply port 14a of the immersion passage 14. The excess treatment liquid L is recovered from a drain part 16 formed in the discharge side vicinity of the immersion passage 14 and returned to the supply port 14a, and the treated workpiece W is discharged from a discharge opening 14b of the immersion passage 14. COPYRIGHT: (C)2004,JPO
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