发明名称 Aspherical microstructure, and method of fabricating the same
摘要 As a method of fabricating aspherical microstructures, a protruding microstructure is formed on a substrate, an aspherical-profile forming layer is formed on the substrate and the protruding microstructure, and the aspherical-profile forming layer is hardened. An aspherical profile is formed on the protruding microstructure due to a surface tension of the aspherical-profile forming layer in the step of forming the aspherical-profile forming layer, and the aspherical profile is maintained through the step of hardening the aspherical-profile forming layer.
申请公布号 US2004058466(A1) 申请公布日期 2004.03.25
申请号 US20030664913 申请日期 2003.09.22
申请人 CANON KABUSHIKI KAISHA 发明人 USHIJIMA TAKASHI;YAGI TAKAYUKI
分类号 G02B3/00;B29C33/38;G02B1/02;G02B3/02;H01L21/00;H01L27/146;H01L27/148;H01L31/0232;(IPC1-7):H01L21/00 主分类号 G02B3/00
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