MAGNETORESISTANCE EFFECT ELEMENT AND PRODUCTION METHOD AND APPLICATION METHOD THEREFOR

摘要

A magnetoresistance effect element comprising a metal artificial lattice film (4) consisting of at least two layers of magnetic thin film and metal non-magnetic thin film alternately laminated on part of a substrate (1) and being formed into a specified pattern, a first protection film (5) formed to cover the metal artificial lattice film (4), and a second protection film (6) formed on the first protection film (5), wherein the first protection film (5) has a residual stress of practically zero, and the second protection film (6) consists of a material having a moisture permeation preventing power. Accordingly, the magnetoresistance effect element is free from hysteresis even in a high-temperature condition, small in characteristics deterioration, and excellent in heat resistance and corrosion resistance, and is applicable even in a rigorous environment such as an automobile.