| 摘要 |
<P>PROBLEM TO BE SOLVED: To position abrasive cloth with high accuracy while reducing the load of sticking work. <P>SOLUTION: Protective films 2a to 2c on a pressure sensitive adhesive layer 2b are divided into three parts along slits 13a, 13b, notches 14a, 14b taken as an index for positioning are provided, and guide patterns 22a, 22b taken as an index for positioning abrasive cloth 2 are provided on the surface of a polishing table 1. <P>COPYRIGHT: (C)2004,JPO |
