LIQUID EJECTION HEAD AND LIQUID EJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a liquid ejection head and a liquid ejector in which displacement amount of a diaphragm can be prevented from lowering and constant liquid ejection characteristics can be obtained at all times. SOLUTION: The liquid ejection head comprises a channel forming substrate 10 in which pressure generation chambers 12 communicating with nozzle openings for ejecting liquid are formed, and piezoelectric elements 300 provided on one side of the channel forming substrate 10 in order to generate a pressure variation in the pressure generation chambers 12. A protective film 15 composed of a dielectric material and exhibiting corrosion resistance to the liquid is provided at least on the inner surface of the pressure generation chambers 12 formed in the channel forming substrate 10. The protective film 15 provided on the diaphragm side of the pressure generation chamber 12 is made thinner on the opposite end part sides in the widthwise direction of the pressure generation chamber 12 than on the central part in the widthwise direction. COPYRIGHT: (C)2004,JPO