| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck for easily handling grinding chips at low cost, obtaining large adsorption force with small sucking force, and preventing the occurrence of distortion of the adsorbing surface. SOLUTION: A number of air suction holes 2 are bored in the top surface of a chuck body 1. A vacuum ejector 3 for sucking air from the air suction holes 2 by compressed air supplied from the outside is provided on the side of the chuck body 1. A workpiece 7 is adsorbed on the top surface of the chuck body 1 by sucking action of the vacuum ejector 3. The chuck body 1 is formed of pure metallic material. The air suction holes 2 are communicated with each other by lateral holes 4 bored vertically and horizontally in a plan view from the side of the chuck body 1. The end part 4a of the lateral hole 4 opened to the side of the chuck body 1 is closed, and the vacuum ejector 3 and the air suction holes 2 are communicated with each other through the lateral hole 4. COPYRIGHT: (C)2004,JPO
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