发明名称 MEMORY ARCHITECTURE WITH MEMORY CELL GROUPS
摘要 An improved cell design for series memory architecture is disclosed. The improved cell design facilitates the formation of capacitors using a single etch process instead of two, as conventionally required. In one embodiment, each capacitor of a capacitor pair is provided with at least one plug contacting a common diffusion region of two adjacent cell transistors. In another embodiment, a large plug with sufficient overlap to the bottom electrodes of pair of capacitors is used.
申请公布号 US2004056286(A1) 申请公布日期 2004.03.25
申请号 US20020065123 申请日期 2002.09.19
申请人 JACOB MICHAEL;HILLIGER ANDREAS;ROEHR THOMAS;SHUTO SUSUMO;OZAKI TORU 发明人 JACOB MICHAEL;HILLIGER ANDREAS;ROEHR THOMAS;SHUTO SUSUMO;OZAKI TORU
分类号 G11C11/22;H01L21/8246;H01L27/115;(IPC1-7):H01L29/94 主分类号 G11C11/22
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