发明名称 |
GETTER-PUMPE ZUR STROMAUFWÄRTS-VERWENDUNG IN DER NÄHE UND KOAXIAL ZU EINER TURBOMOLEKULARPUMPE |
摘要 |
<p>A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire having turns (18, 18a) or formed of several zigzag-shaped segments mutually in series between two end points (22), such as to lie in an annular-shaped peripheral zone, concentric with respect to said cartridge (10) and coated with a sintered porous layer of non-evaporable getter material in form of powder. Said cartridge (10) is inserted into a steel stub (30) which is fastened on one side to the chamber to be evacuated and on the other side to a turbomolecular pump. The getter device (20) may be directly supplied with electric current from the outside through said ends (22).</p> |
申请公布号 |
DE69814312(T2) |
申请公布日期 |
2004.03.25 |
申请号 |
DE1998614312T |
申请日期 |
1998.06.11 |
申请人 |
SAES GETTERS S.P.A., LAINATE |
发明人 |
GIANNANTONIO, ROBERTO;CONTE, ANDREA |
分类号 |
F04B37/04;F04B37/02;F04D19/04;F04D25/16;(IPC1-7):F04B37/02 |
主分类号 |
F04B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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