| 摘要 |
PROBLEM TO BE SOLVED: To suppress the return of twist or the kink of a wire cable for pulling up a silicon single crystal rod. SOLUTION: A silicon melt 12 is stored in a quartz crucible 13 provided in a chamber 11, a horizontal magnetic field formed by a pair of exciting coils 31 is applied to the silicon melt and a seed crystal 24 is dipped into the molten liquid and pulled up while rotating the wire cable 23 to form a neck part 25a. The silicon single crystal rod 25 is formed on the lower part of the neck part by pulling up the wire cable further to move the seed crystal upward while rotating it. In the case that the diameter of the neck part 21a is≤6 mm and the diameter of the silicon single crystal rod 25 is≥300 mm, the exciting coils 31 and 31 are made saddle like and the wire cable 23 is rotated so that the seed crystal is rotated at≥8 revolution/min to≤12 revolution/min in the formation of the silicon single crystal rod 25. COPYRIGHT: (C)2004,JPO |
