发明名称 SEMICONDUCTOR STORAGE DEVICE, ITS CONTROL METHOD AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor storage device and its manufacturing method in which a memory cell is reduced in size and a write operating voltage is suppressed low. SOLUTION: There are provided a first gate electrode 4A provided on a first insulating film and a second gate electrode 4B provided on a second insulating film 3B and a second insulating film. First and second diffused layers, the first insulating film and a first gate electrode are formed as a first memory cell, and second and third diffused layers, the second insulating film and a second gate electrode are formed as a second memory cell. The first and second gate electrodes 4A, 4B are connected in common and formed as a word line electrode, and the first and second diffused layers 2A, 2B are connected to first and second reading lines arranged in an upper layer of a substrate. Further, a second diffused layer 2C is connected to a write and erase exclusive bit line arranged in the upper layer of the substrate, to write selected memory cell transistors by hot electron implantation and to erase by hot hole implantation. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004095893(A) 申请公布日期 2004.03.25
申请号 JP20020255561 申请日期 2002.08.30
申请人 NEC ELECTRONICS CORP 发明人 NISHISAKA TEIICHIRO;SAKAI ISAYOSHI;YOSHINO AKIRA;KAWAI SHINICHI;ISHIGE SEIICHI;HAMASHIMA TOMOHIRO;TANAKA MOTOKO
分类号 H01L21/8247;G11C16/04;H01L21/8246;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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