| 摘要 |
PROBLEM TO BE SOLVED: To make the magnetic field on the surface of a substrate held by a holder small to unify the magnetic field distribution in a device equipped with a motor having a rotor of semicircle structure. SOLUTION: The ion beam irradiating equipment, or more concretely, a holder driving gear 11 constituting it, is a motor for driving the holder 6 holding the substrate 4 to change its angle of inclinationθand is provided with a motor (a tilting motor) 12 having a rotor 14 made by arraying permanent magnets 16 in a semicircular shape. Further, it is provided with a shielding plate 36 arranged along a rear face of the holder 6 and made of a magnetic material, and two magnetic path members 42 magnetically combining both end parts of the rotor 14 of the motor 12 and the shielding plate 36 and made of a magnetic material. COPYRIGHT: (C)2004,JPO
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