| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize surface smoothness of high accuracy on the surface of a glass substrate after polishing in a single-side polishing process for polishing the surface of the glass substrate. <P>SOLUTION: A back pad for holding the glass substrate is manufactured by cutting a foam sheet made of porous soft resin with a pressure sensitive adhesive double coated sheet stuck thereto, in prescribed shape. As sticking conditions when sticking the pressure sensitive adhesive double-coated sheet to the foam sheet using a pair of sticking rollers in the manufacturing process, roller pressure, sticking speed and a clearance between the sticking rollers in sticking are limited to acquire the back pad with extremely small surface unevenness, and this back pad is used for polishing. <P>COPYRIGHT: (C)2004,JPO |
