| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for regulating the axis of an aspheric mirror, which method can regulate the axis of the aspheric mirror and the optical axis of incident light on the aspheric mirror and permits passive regulation of not requiring actual products and expensive measuring instruments. SOLUTION: When the optical axis of a detecting optical system is defined as the Z-axis and the two-dimensional coordinates orthogonal with the Z-axis regulated by an imaging means for the image detected by the detecting optical system as the X-axis and the Y-axis, the Z-axis component of the reflected light from the aspheric mirror obtained by irradiating the aspheric mirror with parallel light beams from the Z-axis direction is measured at a predetermined range within the X-Y plane and the positions of the point to maximize brightness are measured by each of the X coordinates. The turning angle around the X-axis of the aspheric mirror is decided to be within the desired range by a change in the correlation coefficient indicating the distribution of these point groups. COPYRIGHT: (C)2004,JPO |
