发明名称 |
Electron emission thin-film, plasma display panel comprising it and method of manufacturing them |
摘要 |
Disclosed are an electron emission thin-film with improved secondary electron emission characteristics compared with conventional ones, a plasma display panel including the electron emission thin-film, and their manufacturing methods. Using a vacuum deposition system, a protective layer that is an MgO thin-film is formed on a dielectric layer formed on a front glass substrate. At the time of deposition, angles that lines linking the central point of a target material for the protective layer respectively with the central point and both ends points of the front glass substrate form with the front glass substrate are exclusively in a range of 30 to 80°. This enables at least some of MgO columnar crystals constituting the protective layer to have flat planes that are inclined with respect to the surface of the thin-film.
|
申请公布号 |
US2004056594(A1) |
申请公布日期 |
2004.03.25 |
申请号 |
US20030275795 |
申请日期 |
2003.06.02 |
申请人 |
KOTERA KOICHI;OOE YOSHINAO;KONO HIROKI;TANAKA HIROYOSI |
发明人 |
KOTERA KOICHI;OOE YOSHINAO;KONO HIROKI;TANAKA HIROYOSI |
分类号 |
H01J1/316;H01J17/04;(IPC1-7):H01J17/49 |
主分类号 |
H01J1/316 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|