| 摘要 |
Reduced degradation to capacitor properties is disclosed. A hydrogen storage layer is provided over at least a portion a top capacitor electrode. The hydrogen storage layer absorbs and stores hydrogen, preventing hydrogen from diffusing to the capacitor. The hydrogen storage layer comprises, for example, lanthium nitride, titanium zirconium nitride, amorphous sm-co, nanostructured carbon, or a combination thereof.
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