摘要 |
A method and apparatus used for the application of plating/coating in a cathodic arc process to improve coating uniformity, deposition rates, quality, cost, packaging, arc triggering, target wear and other improvements is described in the patent. The process improvements utilize a cathode with voltage/current switching to two or more electrical cathode contacts, employment of magnets on the backside of the cathode, a non-mechanical arc initiation trigger, patterned target surfaces, adjustable cathode insulation, current modulation, and new packaging schemes. |
申请人 |
IONEDGE CORPORATION;SUNTHANKKAR, MANDAR, B.;STOREY, DANIEL, M. |
发明人 |
SUNTHANKKAR, MANDAR, B.;STOREY, DANIEL, M. |