ACTIVE MATRIX BACKPLANE FOR CONTROLLING CONTROLLED ELEMENTS AND METHOD OF MANUFACTURE THEREOF

摘要

An electronic device is formed from electronic elements (70, 74) deposited on a substrate (10). The electronic elements are deposited on the substrate by advancing the substrate through a plurality of deposition vacuum vessels (4-1 to 4-12), with each deposition vacuum vessel having at least one material deposition source (8-1 to 8-12) and a shadowmask (12-1 to 12-12) positioned therein. The material from at least one material deposition source (8) positioned in each deposition vacuum vessel (4) is deposited on the substrate (10) through the shadowmask (12) positioned in the deposition vacuum vessel (4) to form on the substrate (10) a circuit comprised of an array of electronic elements. The circuit is formed solely by the successive deposition of materials on the substrate (10).