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发明名称
Verfahren zum Verringern/zum lokalen Verringern eines Resistmusters in einer Hableitervorrichtung
摘要
申请公布号
DE19857094(B4)
申请公布日期
2004.03.25
申请号
DE19981057094
申请日期
1998.12.10
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
SAITO, TAKAYUKI;ISHIBASHI, TAKEO;TOYOSHIMA, TOSHIYUKI;SUGINO, KANJI
分类号
G03F7/40;H01L21/027;H01L21/033;(IPC1-7):H01L21/312;G03F7/039;H01L21/310
主分类号
G03F7/40
代理机构
代理人
主权项
地址
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