| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device which can shorten the time required for alignment. SOLUTION: An object 5 is held on a holding stage 35 of a facility device. Detection signals corresponding to a position on the outer peripheral edge of the object 5 are acquired by a light emitting element and a light receiving element 53 by rotating a rotary stage 34. Deviation to an alignment reference position of the object 5 is obtained on the basis of the detection signals. The object 5 is aligned with the reference position by movement-controlling an XYθstage 21 so as to eliminate the deviation. COPYRIGHT: (C)2004,JPO |
