| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixed pattern noise compensation data creating means for surely removing a fixed pattern noise. SOLUTION: A wafer 7 is relatively moved to an imaging optical system, and image data in different areas on a wafer 7 are acquired, and when a correction target minimum level, the number of image data acquired by the first process, and the mean value of the gray level of each of pixels of each of image data and the gray level of each of the image data are respectively set as La, N, Gni and Gn, at least pixels fulfilling ¾Gni-Gn¾>La×√n are removed from each of the image data, and then pixels fulfilling ¾Gni-Gn¾>La×√n are removed from the image data, and fixed pattern noise correction data are created, based on the image data. COPYRIGHT: (C)2004,JPO
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