| 摘要 |
PROBLEM TO BE SOLVED: To provide highly accurate and smooth movement of a table without causing extensive enlargement, complication of a structure, and cost increase in a hydrostatic guiding device. SOLUTION: In the hydrostatic guiding device 12, a pair of right and left rail parts 21 and 22 is formed on a bed 11, a pair of right and left guide parts 23 and 24 fitting on the rail parts 21 and 22 is formed on the table 13, upper hydrostatic pockets 27 and 28 and lower hydrostatic pockets 29 and 30 are formed in upper and lower sliding faces of the guide parts 23 and 24 facing upper and lower sliding faces of the rail parts 21 and 22, and lower sliding faces 23c and 24c of the guide parts 23 and 24 are inclined a predetermined angleθso that a tip side is positioned upward. COPYRIGHT: (C)2004,JPO
|
