发明名称 Probe title for probing semiconductor wafer
摘要 A tile used to hold one or more probes for testing a semiconductor wafer. The tile has one or more sites for inserting one or more probes to test the semiconductor wafer. Each site has one or more holes. Each hole is coupled with a slot forming an angle. A probe is inserted into the tile from a top of the tile through the hole and seated on the slot. The probe has a probe tip. The probe tip is in contact with the semiconductor wafer at one end of the slot at a bottom of the tile. The probe tip is aligned with an X and Y coordinates of a bond pad on the semiconductor wafer.
申请公布号 US2004056676(A1) 申请公布日期 2004.03.25
申请号 US20030601764 申请日期 2003.06.23
申请人 发明人 ROOT BRYAN J.
分类号 G01R1/067;G01R1/073;G01R31/02;G01R31/28;(IPC1-7):G01R31/02 主分类号 G01R1/067
代理机构 代理人
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