| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce fine irregularities formed during film formation on a multilayer film used as a release film, etc., of a forming die for mold-forming an optical element, etc. <P>SOLUTION: The forming die comprises cemented carbide as a base metal 10 and has the multilayer film 20 comprising a TiN film 21, a Cr film 22 and a precious metal film 23 as a release film on its surface. The fine irregularities formed on the film-forming surface of the TiN film 21 are almost directly reflected on the outermost surface of the multilayer film 20 and are therefore transferred onto the surface of the optical element molded with the forming die, causing optical performance deterioration by scattering of light. To prevent this, a treatment is performed to reduce the fine irregularities through polishing, etc., after forming the TiN film 21, the Cr film 22 or the precious metal film 23. <P>COPYRIGHT: (C)2004,JPO |
