| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stress measuring method more accurate than a conventional sin<SP>2</SP>Ψmethod for a tetragonal-system, polycrystal and c-axis-oriented sample. <P>SOLUTION: An X-ray optical system is set at the location ofψ=0°. X-rays 14 incident onto the sample 10 from an X-ray source 12 are diffracted at a crystal face (the direction of its normal line is the direction of an angleΨ) having a Miller index (hkl), and diffracted X-rays 16 are detected by an X-ray detector 18. When the Miller index is determined, a Bragg angleθ<SB>0</SB>in a distortion-free state is determined. An angle of diffractionθin a distorted state is measured in the vicinity of the angleθ<SB>0</SB>. It is possible to compute a distortionεfrom the difference between the measured valueθand the Bragg angleθ<SB>0</SB>. Distiotionsεare determined on a plurality ofΨ. Then a distortionεis similarly determined on eachΨatψ=45°and 90°. When a plane stress state is assumed, it is possible to determine a specific stress arithmetic expression on a tetragonal system of which the Laue symmetry belongs to 4/mmm. When the above-mentioned measurement results are plotted in a graph on the basis of the stress arithmetic expression, it is possible to determine stress from the inclination of its straight line. <P>COPYRIGHT: (C)2004,JPO</p> |
