INSPECTION DEVICE AND METHOD FOR ARRAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for an array substrate which can detect a defective pixel related to a punch-through voltage not detectable by a conventional inspection device, and to provide an inspection method therefor.

SOLUTION: This inspection device comprises: a means to apply a first voltage VGH1 to a switching element 16 so as to accumulate electric charge in a storage capacitance 26 and in a capacitance 24 between a gate and an electrode; and a means to apply a second voltage VGH2 with a voltage value different from the first voltage VGH1 to the switching element 16 in reading out the electric charge accumulated in the storage capacitance 26 and in the capacitance 24 between the gate and the electrode.

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