METHOD FOR COOLING OPTICAL COMPONENT, APPARATUS FOR COOLING OPTICAL COMPONENT, AND EUV EXPOSURE SYSTEM EMPLOYING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for cooling an optical component which exerts high optical performance. SOLUTION: Refrigerant channels 3 are provided in a cooling member 2 which is in contact with the optical component 1. A temperature controlled refrigerant is poured into each of the channels 3 to cool the optical component 1. An elastic member (sponge member) 4 having an opening is arranged in each of the channels 3 to absorb or buffer the vibration of the refrigerant flow. COPYRIGHT: (C)2004,JPO